Message from the Director
WELCOME to the Micro and Nanotechnology Laboratory (MNTL) at the University of Illinois. The MNTL has a very rich history of innovation, excellence, and leadership evidenced through the development of many paradigm-shifting and revolutionary innovations such as the light emitting diode (LED), laser transistors, plasma display, just to name a few...Read the Message from the director
To create, support, and sustain an environment to facilitate
advanced research in photonics, microelectronics, biotechnology
and nanotechnology for the benefit of the University community,
the State of Illinois, and society as a whole.
The Micro and Nanotechnology Laboratory is a multidisciplinary
research facility in the College of Engineering that houses advanced
equipment to support research in photonics, microelectronics,
nanotechnology, and biotechnology. The research activities that
are facilitated by the Laboratory can be divided into four areas
which are: Optoelectronics and Photonic Systems, Microelectronics
for Wireless Communications, Microelectromechanical Systems,
The research programs of the Optoelectronics and
Photonic Systems area are focussed on the conceptualization,
and testing of microelectronic and optoelectronic devices, circuits,
components, and systems for lightwave communications and optical
The activities of the Microelectronics for Wireless Communications
area include the design and fabrication of state-of-the-art,
low-power RF and microwave monolithic integrated circuits (MMICs)
and GHz analog-to-digital converters for advanced wireless communication
systems and advanced digital radar systems.
The above two research areas are supported in the Laboratory
with extensive development of growth, characterization, and processing
technologies for a broad range of III-V semiconductor materials,
quantum wells, superlattices, and nanostructures. The III-V materials
include compounds and alloys with bandgaps appropriate for UV
detectors, visible emitters, near- and mid-infrared sources (LEDs,
side-emitting lasers, and VCSELs), detectors, FETs, and HBTs.
The Microelectromechanical Systems (MEMS) area focuses on the
development of micromachining methods for a variety of materials
such as silicon, gallium arsenide, and polymers to enable applications
in many interdisciplinary areas, including wireless communications,
optoelectronics, and biomedical engineering.
The Nanobiosystems area focuses on utilizing the various technologies
developed in materials, nanofabrication, devices, and MEMS to
study and solve biological issues. Biomolecular flow patterns
in nanoscale channels, integration of lasers onto biochips for
real-time fluorescence study of bioreactions, and implantation
of active devices in cells to study cellular biochemistry are
examples of research activities being carried out.
The Micro and Nanotechnology Laboratory is one of the nations
largest and most sophisticated university-based facilities for
semiconductor, nanotechnology, and biotechnology research. It
contains over 8,000 square feet of class 100 and class 1000 clean
room laboratory and state-of-the-art ultra-high-speed optical
and electrical device and circuit measurements. The Laboratory
has in the past housed various centers including the NSF-funded
Engineering Research Center for Compound Semiconductor Microelectronics
and the DARPA-funded Center for Optoelectronic Science and Technology.
It currently houses the DARPA-funded Center for Bio-Optoelectronic
Sensors and Systems. The laboratory is a User Facility that is
available for use by university and industrial personnel from
across the nation.