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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


Message from the Director

WELCOME to the Micro and Nanotechnology Laboratory (MNTL) at the University of Illinois.  The MNTL has a very rich history of innovation, excellence, and leadership evidenced through the development of many paradigm-shifting and revolutionary innovations such as the light emitting diode (LED), laser transistors, plasma display, just to name a few...Read the Message from the director

Mission Statement

To create, support, and sustain an environment to facilitate advanced research in photonics, microelectronics, biotechnology and nanotechnology for the benefit of the University community, the State of Illinois, and society as a whole.


The Micro and Nanotechnology Laboratory is a multidisciplinary research facility in the College of Engineering that houses advanced equipment to support research in photonics, microelectronics, nanotechnology, and biotechnology. The research activities that are facilitated by the Laboratory can be divided into four areas which are: Optoelectronics and Photonic Systems, Microelectronics for Wireless Communications, Microelectromechanical Systems, and Nanobiosystems.

The research programs of the Optoelectronics and Photonic Systems area are focussed on the conceptualization, design, fabrication, and testing of microelectronic and optoelectronic devices, circuits, components, and systems for lightwave communications and optical interconnects.

The activities of the Microelectronics for Wireless Communications area include the design and fabrication of state-of-the-art, low-power RF and microwave monolithic integrated circuits (MMICs) and GHz analog-to-digital converters for advanced wireless communication systems and advanced digital radar systems.

The above two research areas are supported in the Laboratory with extensive development of growth, characterization, and processing technologies for a broad range of III-V semiconductor materials, quantum wells, superlattices, and nanostructures. The III-V materials include compounds and alloys with bandgaps appropriate for UV detectors, visible emitters, near- and mid-infrared sources (LEDs, side-emitting lasers, and VCSELs), detectors, FETs, and HBTs.

The Microelectromechanical Systems (MEMS) area focuses on the development of micromachining methods for a variety of materials such as silicon, gallium arsenide, and polymers to enable applications in many interdisciplinary areas, including wireless communications, optoelectronics, and biomedical engineering.

The Nanobiosystems area focuses on utilizing the various technologies developed in materials, nanofabrication, devices, and MEMS to study and solve biological issues. Biomolecular flow patterns in nanoscale channels, integration of lasers onto biochips for real-time fluorescence study of bioreactions, and implantation of active devices in cells to study cellular biochemistry are examples of research activities being carried out.

The Micro and Nanotechnology Laboratory is one of the nations largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains over 8,000 square feet of class 100 and class 1000 clean room laboratory and state-of-the-art ultra-high-speed optical and electrical device and circuit measurements. The Laboratory has in the past housed various centers including the NSF-funded Engineering Research Center for Compound Semiconductor Microelectronics and the DARPA-funded Center for Optoelectronic Science and Technology. It currently houses the DARPA-funded Center for Bio-Optoelectronic Sensors and Systems. The laboratory is a User Facility that is available for use by university and industrial personnel from across the nation.