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Micro and Nanotechnology Laboratory | U of I

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Micro and Nanotechnology Laboratory
208 North Wright Street Urbana, Illinois 61801


Office hours 8:30a - 5:00p


Phone: 217-333-3097
Fax: 217-244-6375


MNTL Cleanroom Laboratory Access Procedure

Please read the following lab access procedures carefully! Failure to complete each step of these instructions could prevent or delay your access to the Cleanroom Laboratories within MNTL.

  1. Complete and submit the Keycard Request Form. You can also obtain a print copy from the MNTL Business Office in Room 2104 MNTL. You need to get this form signed by your PI, or he/she can e-mail the business office stating that you can take the training.
  2. If cylinder key(s) are needed, please print out a Cylinder Key Request Form and submit it to the business office. Make sure it is signed by your PI.
  3. Complete and submit the following online forms and training session certificates:
    1. The MNTL Questionnaire for New Cleanroom Users
    2. Take the online General Lab Safety Training offered by the University’s Division of Research Safety (DRS). If you are an external user, please send e-mail to for DRS login and password information. Please submit the certificate that you receive after this training
    3. Take the DRS online HF Safety Training program. Please submit the certificate that you receive after this training.

    Online key card request form and MNTL Cleanroom questionnaire must be submitted by Friday 2:00pm before the training day.

    All the certificates must be submitted before the training either my email or drop off on the same day.

  4. Attend the MNTL Cleanroom Lab Orientation and Safety Training, normally held from 2:30 p.m. until 4:00 p.m. on the first Tuesday and third Monday of each month. Report to Room 2104 MNTL no later than 2:20 p.m. when you first arrive for the training. Your submitted Cleanroom forms are your confirmation that you want to attend the training.
  5. Attend the MNTL Building Safety Training, also normally held on the first Tuesday and third Monday of each month at 4:00 p.m. Report to Room 2104 MNTL when you arrive for the training. Your submitted Keycard Request Form and General Lab Safety Training Certificate are your confirmation that you want to attend the training.
  6. Depending on your cleanroom and fabrication experience, you may be required to take a short sequence of training modules covering the four basic process areas: lithography, deposition, etching, and metrology. The training modules will be held monthly for a limited number of attendees. Contact Dr. Nancy Johnson ( about these modules after your cleanroom lab orientation. MRL also offer the equivalent process modules except metrology module, which are accepted by MNTL.
  7. Attend the MNTL Cleanroom Walk-through which is held by our research engineers 4 times per month. New users can check the schedule and, at least one day before the schedule walkthrough, email the assigned engineer to arrange the walk-through.
  8. You can obtain a Proximity Card Form no sooner than one day after your training. If you already have a 5-digit prox card number on the back of your i-card, you do not need to get another prox card number. If you do need a prox card number, the form is $8.50, payable by cash or check (no debit or credit cards).
  9. You will be able to get cylinder keys after you have obtained your prox card number. Each key requires a $25 refundable deposit, payable by cash or check.

Once the above access procedures have been finalized, cleanroom users should contact the appropriate “super-user” to schedule individual training on the processing equipment within the cleanroom labs. (See Cleanroom Equipment Super-User List.) Also be aware that anyone using the MNTL cleanrooms after hours is required to follow the laboratory's Buddy System Policy. If you plan to use hydrofluoric acid (HF) in any concentration in MNTL cleanroom, please fill out this online form. Our staff will contact you to provide additional training for HF usage in MNTL.

Send e-mail to or call 217-244-1942 if you have additional questions regarding cleanroom access.